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| Al、Sn掺杂对于ZnO薄膜微结构及光学特性的影响 |
| The microstrcuture and optical properties of Al,Sn doped ZnO thin film |
| 投稿时间：2014-11-04 |
| DOI：10.3969/j.issn.1005-5630.2015.03.019 |
| 中文关键词: ZnO薄膜 热氧化 掺杂 可见光谱 微结构 |
| 英文关键词:ZnO thin film thermal oxidation dopants visible spectrum microstructure |
| 基金项目:国家高技术研究发展计划(863计划)资助项目(2013AA030602);上海市自然科学基金资助项目(13ZR1427800);国家自然科学基金资助项目(61176085、11105149) |
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| 中文摘要: |
| 采用真空电子束蒸发金属薄膜及后续热氧化技术在石英衬底上分别制备出了ZnO、Al:ZnO以及Sn:ZnO薄膜。通过X射线衍射仪(XRD),紫外-可见分光光度计和原子力显微镜(AFM)等分析仪器对比研究了Al、Sn掺杂对ZnO薄膜结晶质量、光学性质及表面形貌的影响。测试结果表明,Al、Sn掺杂可以使薄膜结晶质量得到提高,薄膜应力部分释放,薄膜表面的粗糙度也相应增加,掺杂对薄膜光学带隙的影响在一定程度取决于金属薄膜的氧化程度,氧化充分可以使光学带隙变宽,反之则变窄。 |
| 英文摘要: |
| ZnO, Al:ZnO and Sn:ZnO thin film were obtained by thermal oxidation metal or alloy films deposited by vacuum electron beam evaporation technology. The effects of different dopants on the microstructure and optical properties of ZnO thin films were investigated by X-ray diffraction(XRD), optical transmittance, absorption and atomic force microscopy (AFM) measurement. The characterization results indicate that the metal doping has the effect of improving the crystal quality, partially releasing the stress and increasing the surface roughness of the film. The effect of dopant on the optical band-gap of the film depends on the oxidation level of the metal film. |
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