|
| 基于ASTM方法的光学平面面形检测 |
| Measurement on optical plane surface based on ASTM method |
| 投稿时间：2014-08-23 |
| DOI：10.3969/j.issn.1005-5630.2015.01.002 |
| 中文关键词: 斐索干涉仪 干涉图 平面面形检测 ASTM方法 |
| 英文关键词:Fizeau interferometer interference fringes plane surface measurement American Society for Testing and Materials (ASTM) method |
| 基金项目: |
|
| 摘要点击次数: 3192 |
| 全文下载次数: 3901 |
| 中文摘要: |
| 为分析光学平面面形偏差,以直径100 mm光学平晶为检测对象,利用斐索干涉仪采集了被测光学平面的波面干涉图,按照美国材料与试验协会(American Society for Testing and Materials,ASTM)标准方法,通过分析,能够定性反映出被测光学平面的面形偏差。计算并分析了波面偏差指标峰谷值PV和均方根值RMS,将计算结果与利用ZYGO斐索干涉仪测得的数据对比,偏差为10-3λ,符合光学检测要求。综合考虑可操作性和计算精度,这种基于ASTM的方法是一种行之有效的光学检测分析方法。 |
| 英文摘要: |
| In order to obtain the optical plane surface error, firstly interference fringes of optical plane were collected through Fizeau interferometer on a 100 mm optical flat. Then, according to American Society for Testing and Materials (ASTM) standard method, the optical plane surface was tested by analysis of the interference fringes with horizontal method and longitudinal method. The result tells the optical plane surface error qualitatively and intuitively. Finally, the values of the RMS and PV were calculated, and compared with the data collected by ZYGO interferometer. The difference between them is 10-3λ approximately. The result satisfies the requirement of optical testing. Thus, ASTM method is the effective choice if operability and precision are comprehensively considered. |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
|
|
|
