|
| 偏振器件坐标标定及测量系统研究 |
| Research on polarization device coordinate calibration and measurement system |
| 投稿时间：2025-01-24 |
| DOI：10.3969/j.issn.1005-5630.202501240014 |
| 中文关键词: 偏振器件 径向偏振器 偏振坐标 几何坐标 |
| 英文关键词:polarization devices radial polarizers polarization coordinates geometric coordinates |
| 基金项目: |
|
| 摘要点击次数: 0 |
| 全文下载次数: 0 |
| 中文摘要: |
| 针对偏振器件透光轴方向的高精度标定问题，提出了一种基于径向偏振器的可视化方法，实现了偏振器件偏振方向与几何方向的精确测量。通过设计算法并结合傅里叶变换提取相位，计算出偏振器件透光轴的位置，标定了偏振器件的偏振坐标；同时，通过将部分光束照射到偏振器件的边缘位置，形成切边，确定了偏振器件的几何坐标。实验通过旋转待测器件，以0.04°为步长进行旋转，验证了测量精度可达0.04°。此外，设计了一套基于LabVIEW的实时检测系统，显著提升了测量效率与实用性。该方法为高精度偏振器件标定提供了新的解决方案，适用于光刻技术、光学通信等领域。 |
| 英文摘要: |
| In this study, to address the problem of high-precision calibration of the direction of the transmittance axis of the polarisation device, a visualisation method based on a radial polariser is proposed to achieve the accurate measurement of the polarisation direction and geometric direction of the polarisation device. By designing an algorithm and extracting the phase with Fourier transform, the position of the transmittance axis of the polarization device is calculated, and the polarisation coordinates of the polarisation device are calibrated. At the same time, the geometrical coordinates of the polarisation device are determined by irradiating a part of the light beam to the edge position of the polarisation device to form a tangent edge. The experiment verified that the measurement accuracy could reach 0.04° by rotating the device to be measured in steps of 0.04°. In addition, a LabVIEW-based real-time inspection system is designed in this paper, which significantly improves the measurement efficiency and practicality. The method provides a new solution for high-precision polarisation device calibration, which is suitable for photolithography, optical communication and other fields. |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
