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| 极紫外透射薄膜滤片研究进展 |
| Research progress of transmissive thin-film filters in the extreme ultraviolet ranges |
| 投稿时间：2025-01-01 |
| DOI：10.3969/j.issn.1005-5630.202501010001 |
| 中文关键词: 极紫外 透射 薄膜 滤片 制备工艺 性能 |
| 英文关键词:extreme ultraviolet transmissive thin-film filter preparation process performance |
| 基金项目: |
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| 摘要点击次数: 1047 |
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| 中文摘要: |
| 透射式薄膜滤片是极紫外波段重要的光学元件，其在半导体制造、同步辐射光源、材料分析、空间天文观测等诸多科学技术领域具有广泛的应用。本文综述了透射式薄膜滤片的设计、制备工艺、使用性能等方面的研究进展，重点介绍了滤片的机械强度及其在不同波长下的光学特性，分析了膜层材料与膜系参数对滤片热稳定性的影响。同时，讨论了滤片在工程应用中所面临的针孔缺陷和膜层污染等问题与挑战，旨在推动我国极紫外透射式薄膜滤片的研制进程。 |
| 英文摘要: |
| Transmissive thin-film filters are important optical elements in the extreme ultraviolet (EUV) bands, which have been widely used in many scientific and technological fields such as semiconductor manufacturing, synchrotron radiation, material analysis, space astronomical observation, etc. In this paper, we review the research progress of transmissive thin-film filters on their design, preparation process and performance, focusing on the mechanical strengths of the filters and their optical properties at different wavelengths, and analyze the effects of material choices and layer-stack parameters on their thermal stabilities. Furthermore, we also discuss the problems of pinhole defects and challenges of film contamination in engineering applications, aiming to promote the development of EUV transmissive filters in domestic research. |
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