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| 基于相变材料的零级反射调控超表面结构的研究 |
| Phased-material-based metasurface structure for zero-order reflection regulation |
| 投稿时间：2024-12-17 |
| DOI：10.3969/j.issn.1005-5630.202412170109 |
| 中文关键词: 相变材料 超表面 衍射效率 主动调控 |
| 英文关键词:phase-change material metasurface diffraction efficiency active manipulation |
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| 摘要点击次数: 879 |
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| 中文摘要: |
| 利用相变材料Ge2Sb2Te5的可逆相态转变特性，结合超表面结构，设计了一种针对4600 nm红外波段的可调谐的衍射滤波开关。在4600 nm波长处，该结构在非晶态下的零级衍射反射率几乎为零，而晶态时零级衍射反射率约为55%，实现了接近100%的调制对比度，可完成信号的通断调控。为确保该微纳结构的实用性和可制造性，对圆盘高度参数开展了容错性分析，结果表明，其误差范围可达10 nm以内；对圆盘直径参数而言，最佳误差范围在20 nm以内；该结构对圆盘周期参数的敏感性较低，周期长度在5200 ～6200 nm范围内均能保持良好性能。 |
| 英文摘要: |
| Utilizing the reversible phase-change characteristics of Ge2Sb2Te5, this work designs a metasurface with tunable zero-order reflection at the wavelength in infrared band. At the wavelength of 4 600 nm, the GST disk array in its amorphous state exhibits nearly zero reflection for zero-order diffraction, while in its crystalline state, the zero-order diffraction reflection is approximately 55%, achieving a modulation contrast ratio of up to 100% and significantly enabling signal on-off control. To ensure the practicality and manufacturability of this micro-nano structure, we conducted a tolerance analysis on the disk height parameter, which indicated that the error range can be within 10 nm. For the disk diameter parameter, the optimal error range is within 20 nm. Furthermore, this structure is relatively insensitive to the disk period parameter, maintaining good performance within a period length range of 5 200 nm to 6 200 nm. |
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