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| 高陡度宽透射二向色镜的研制 |
| Development of high-steepness and wide-transmission dichroic mirror |
| 投稿时间：2024-09-14 |
| DOI：10.3969/j.issn.1005-5630.202409140089 |
| 中文关键词: 光学薄膜 二向色镜 高陡度 宽透射 薄膜材料 |
| 英文关键词:optical thin film dichroic mirror high-steepness wide-transmission thin film material |
| 基金项目:国家科技部创新方法工作专项(2020IM010400) |
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| 中文摘要: |
| 二向色镜是荧光检测光学系统中的重要光学元器件。基于拉曼检测、流式细胞仪等高端二向色镜应用需求，设计了一种高陡度宽透射二向色镜。该二向色镜采用Nb2O5、Al2O3 和 SiO2 3种薄膜镀膜材料设计、制造，采用带有全能型测量附件（universal measurement accessory，UMA）的Cary 7000完成光谱检测。该二向色镜平均透射率Tavg≥90%，平均反射率Ravg≥98%, 陡度（90%透射沿与2%截止沿的过渡带）≤7 nm，透射带范围＞300 nm。较相同膜层数量、厚度的两种材料制造的二向色镜，由3种材料制造的二向色镜陡度提升了3 nm以上。结果表明，基于Nb2O5/Al2O3/SiO2 3种薄膜材料镀制的高陡度宽透射二向色镜在膜系设计、制造工艺及光学性能等方面均获得了比较理想的效果。 |
| 英文摘要: |
| The dichroic mirror is a critical optical component in fluorescence detection systems. To meet the demands of high-end applications such as Raman spectroscopy and flow cytometry, a high-steepness wide-transmission dichroic mirror was designed and fabricated. This mirror utilized three thin-film coating materials, Nb2O5, Al2O3 and SiO2, and was characterized using a spectrometer (Cary 7000) equipped with a universal measurement accessory (UMA). The dichroic mirror achieved an average transmission Tavg≥90%, an average reflectance Ravg≥98%, and a steepness ≤7 nm (the transition zone between the 90% transmission edge and the 2% cut-off edge). Its transmission band exceeded 300 nm. Compared to dichroic mirrors designed with the same number of layers and thickness but using only two materials, the three-material design improved steepness by more than 3 nm. The results demonstrate that the Nb2O5/Al2O3/SiO2 multilayer coating effectively optimized the optical performance, achieving ideal outcomes in film design, manufacturing processes, and spectral characteristics. |
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