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| 基于相位切趾调制的非对称结构光栅滤波器设计与制备 |
| Design and fabrication of asymmetric grating filter based on phase apodization modulation |
| 投稿时间：2024-03-13 |
| DOI：10.3969/j.issn.1005-5630.202403130050 |
| 中文关键词: 切趾布拉格光栅 侧壁脊调制 光栅滤波器 硅光子学 |
| 英文关键词:apodized Bragg grating sidewall ridge grating filter silicon photonics |
| 基金项目:上海市科学技术委员会项目（23010503600，23530730500）；上海高等学校特聘教授（东方学者）项目（GZ2020015）；嘉兴市科技计划项目（2023AY31016） |
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| 中文摘要: |
| 为了提高波导光栅滤波器的设计灵活性，详细研究了具有不同侧壁脊宽度和位置的相位切趾布拉格光栅结构。利用非对称侧壁脊调制可以灵活地改变光栅滤波器的谐振波长、消光比和抑制带宽。制造了波导宽度为500 nm、光栅周期为400 nm的非对称硅基波导光栅滤波器，并对其进行表征以验证其性能。当侧壁脊宽度从150 nm增加到250 nm，光栅滤波器的谐振波长偏移了4.54 nm。通过将侧壁脊位置错位从50 nm调整到200 nm，光栅滤波器的抑制带宽可以从1.19 nm增加到2.03 nm。实验性能与仿真结果吻合良好。所提出的非对称波导光栅滤波器在光通信和半导体激光器领域具有广阔的应用前景。 |
| 英文摘要: |
| In this work, phase apodized silicon Bragg grating filters with varying sidewall ridge width and location were investigated, while the resonance wavelength, extinction ratio and rejection bandwidth could be tuned flexibly. The grating filters with a waveguide width of 500 nm and grating period of 400 nm were fabricated and characterized for a proof of concept. The resonance wavelength of the device could be shifted by 4.54 nm with varying the sidewall ridge width from 150 to 250 nm. The corresponding rejection bandwidth could be tuned from 1.19 to 2.03 nm by applying a sidewall ridge location offset from 50 to 200 nm. The experimental performances coincide well with the simulation results. The presented sidewall ridge modulated apodized grating filter can be expected to have great application prospects for optical communications and semiconductor lasers. |
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