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| 基于偏振OCT的高分辨率激光焊接检测技术研究 |
| Investigations on high-resolution laser welding inspection technique based on polarization sensitive OCT |
| 投稿时间：2024-03-07 |
| DOI：10.3969/j.issn.1005-5630.202403070037 |
| 中文关键词: 激光焊接检测 光学相干层析成像 光谱仪 偏振态 |
| 英文关键词:laser welding inspection optical coherence tomography spectrometer polarization state |
| 基金项目:中国科学院青年创新促进会资助项目（81927801） |
| 作者 | 单位 | E-mail | | 刘亮威 | 上海理工大学 光电信息与计算机工程学院,上海 200093
中国科学院上海光学精密机械研究所 高端光电装备部,上海 201800 | | | 李中梁 | 中国科学院上海光学精密机械研究所 高端光电装备部,上海 201800
中国科学院大学 材料与光电研究中心,北京 100049 | lizhongliang@siom.ac.cn | | 南楠 | 中国科学院上海光学精密机械研究所 高端光电装备部,上海 201800 | | | 袁春晓 | 中国科学院上海光学精密机械研究所 高端光电装备部,上海 201800 | | | 刘腾 | 中国科学院上海光学精密机械研究所 高端光电装备部,上海 201800
中国科学院大学 材料与光电研究中心,北京 100049 | | | 杨晨铭 | 中国科学院上海光学精密机械研究所 高端光电装备部,上海 201800
中国科学院大学 材料与光电研究中心,北京 100049 | |
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| 中文摘要: |
| 基于光学相干层析成像（optical coherence tomography，OCT）的激光焊接检测技术可以直接测量匙孔深度和焊接表面形貌，但是多重反射伪影会降低OCT焊接检测的准确性。利用偏振OCT探测样品背向散射光偏振态的变化，可以消除激光焊接检测中的多重反射伪影，提高检测的准确性。采用光谱带宽更宽的光源并结合优化的光谱仪设计，在提高系统纵向分辨率的同时，缓解了系统灵敏度随深度的衰减。分析了影响偏振OCT系统光谱仪性能的相关参数，对光谱仪的设计进行了优化，并采用变形的惠更斯目镜结构型聚焦镜组优化像面弥散斑，实现了高分辨率、低倍率色差的光谱仪设计。实验结果表明，OCT系统H和V两通道的纵向分辨率分别从10.2 μm和10.5 μm提高到了4.58 μm和4.30 μm。检测结果表明，本技术消除了匙孔图像中的多重反射伪影，获得了匙孔样品的准确结构信息，并且同样适用于激光焊接缺陷检测。 |
| 英文摘要: |
| The optical coherence tomography (OCT)-based laser welding inspection technique enables direct measurement of keyhole depth and weld seam surface morphology, but multiple-reflection artifacts reduce the accuracy of OCT-based welding inspection. By utilizing polarization sensitive OCT to detect changes in the polarization state of backscattered light, it is possible to mitigate the effects of multiple reflections in laser welding inspection, thereby enhancing the accuracy of inspection. This research utilized a light source with a broader spectral bandwidth, coupled with an optimized spectrometer design, to enhance the system's axial resolution while simultaneously reducing the decay of sensitivity with depth. This study analyzed the relevant parameters affecting the performance of spectrometer in the polarization sensitive OCT system and optimized the design of the spectrometer accordingly. The design of a high resolution, low lateral chromatic aberration spectrometer was achieved by using a deformed Huygens eyepiece structure type focusing mirror set to optimize the image plane chromatic dispersion spot. Experimental results showed that the axial resolution of the H and V channels had been increased from 10.2 μm and 10.5 μm to 4.58 μm and 4.30 μm respectively. In the keyhole imaging experiments, this technique eliminates multiple reflection artifacts and aligns the accurate structure of the keyhole sample. In addition, this technique is also suitable for laser welding defect inspection. |
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