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| 椭圆光斑在四象限探测器定位算法的研究 |
| Research on localization algorithm of elliptical spot in four quadrant detector |
| 投稿时间：2024-01-11 |
| DOI：10.3969/j.issn.1005-5630.202401110005 |
| 中文关键词: 四象限探测器 椭圆光斑 偏移角 定位算法 高斯光斑 |
| 英文关键词:four quadrant detector elliptical spot offset angle localization algorithm Gaussian spot |
| 基金项目:国家重点研发计划(2020YFB2007501) |
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| 摘要点击次数: 968 |
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| 中文摘要: |
| 为提高四象限探测器对椭圆高斯光斑位置的测量精度，特别是在椭圆光斑与四象限探测器中心坐标存在偏移角时的精度，提出了一种椭圆高斯光斑定位算法。以高斯分布的椭圆光斑作为入射光斑模型，通过无穷积分拟合算法和最小二乘法拟合最佳解析表达式。为建立椭圆光斑在四象限探测器位置的所有模型，对偏移角度进行了多项式拟合，简化了椭圆光斑与四象限探测器中心坐标存在偏移角时的定位算法。最后，通过仿真计算，确定偏移角与定位算法的拟合关系式。经过算法补偿后的定位精度能够达到亚微米量级，为椭圆光斑的定位算法提供了理论基础。 |
| 英文摘要: |
| In order to improve the measurement accuracy of the elliptical Gaussian spot position in the four quadrant detector and the position detection accuracy of the elliptical spot and the center coordinate of the four quadrant detector with an offset rotation angle, a localization algorithm for the elliptical Gaussian spot is proposed. An elliptical light spot with Gaussian distribution was used as the incident light spot model, and infinite integral fitting algorithm and the least squares method were used to fit the optimal analytical expression. In order to establish all models of elliptical spot in the four quadrant detector, polynomial fitting was performed on the offset angle to simplify the calculation of the algorithm for locating the offset angle between the elliptical spot and the center coordinate of the four quadrant detector. Finally, based on simulation, the fitting relationship between the offset angle and the localization algorithm was determined. The positioning accuracy of the algorithm can reach sub-micron level, providing a theoretical basis for the localization algorithm of elliptical spots. |
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