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| 共焦显微镜技术及其应用 |
| Confocal microscope technology and application |
| 投稿时间：2023-03-02 |
| DOI：10.3969/j.issn.1005-5630.202303020033 |
| 中文关键词: 共焦显微 三维成像 位移识别 扫描速度 |
| 英文关键词:confocal microscopy 3D imaging displacement identification scanning speed |
| 基金项目:国家重点研究发展计划项目（2018YFC1313803）；深圳市基础研究项目（JCYJ20200109105411133） |
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| 中文摘要: |
| 共焦显微测量是一种很有前景的技术，具有非接触测量和高精度位移识别能力，广泛应用在芯片加工、高精密仪器制造、生物医学、材料化学、工业检测等领域。其沿轴向位置高精度扫描的二维图像可用于三维重建，然而，扫描的速度限制了图像的采集速率，为了克服这一局限性，研究人员提出了许多方法对传统的共聚焦显微镜系统进行了改进。例如，基于扫描振镜光束扫描型共焦显微镜、基于数字微镜装置的共焦显微镜、差分式扫描共焦显微镜等。本文主要讨论了各种共聚焦显微镜的工作原理、物镜类型、扫描方法、优缺点及应用。随着光学核心部件的升级和各种准确、高效算法的出现，未来共焦显微镜的扫描速度会更快、应用范围更广、分辨率更高。 |
| 英文摘要: |
| Confocal micro-measurement is a promising technology with non-contact measurement and high-precision displacement recognition capabilities, which is widely used in chip processing, high-precision instrument manufacturing, biomedicine, material chemistry, industrial testing and other fields. The two-dimensional images scanned with high accuracy along the axial position can be used for three-dimensional reconstruction. However, the scanning speed limits the rate of image acquisition. In order to overcome this limitation, researchers have proposed many methods to improve the conventional confocal microscope system. For example, it mainly includes scanning confocal microscope based on scanning galvanometer beam, confocal microscope based on digital micro-mirror device, differential scanning confocal microscope, etc. Here, this paper mainly discusses the working principle, types of objective lens, scanning methods, advantages and disadvantages, and applications of various confocal microscopes. We believe that with the upgrading of the core components of the optical system and the emergence of various accurate and efficient peak algorithms, the scanning speed of the confocal microscope will be faster; the range will be wider and the resolution will be higher in the future. |
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