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| 基于波像差理论的实数编码遗传算法优化XUV光学系统 |
| Optimization of XUV optical system by real-coded genetic algorithm based on wave aberration theory |
| 投稿时间：2022-11-02 |
| DOI：10.3969/j.issn.1005-5630.2023.003.007 |
| 中文关键词: 波像差理论 实数编码 XUV光学系统 点列图 |
| 英文关键词:wave aberration theory real number coding XUV optical system spot diagram |
| 基金项目:国家自然科学基金(61975111) |
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| 摘要点击次数: 1280 |
| 全文下载次数: 1377 |
| 中文摘要: |
| 由镜和光栅组成的XUV光学系统具有平面对称的性质，结合Lu平面对称光栅系统的波像差理论和均方根像差评价函数得到用以优化XUV光学系统的多参量目标函数。为求解该多自变量且大取值区间的目标函数，提出了一种基于十进制的实数编码遗传算法，并将其用于两种XUV光学系统的优化求值。将求得的优化值用光学仿真软件Shadow进行追迹，并和参考文献进行对比。结果显示本文优化后的光学系统在成像质量上有明显上升，表明波像差理论及本文的实数编码遗传算法可以有效地优化XUV光学系统，为此类系统的优化设计提供了新的思路。 |
| 英文摘要: |
| The XUV optical system composed of mirrors and gratings has the property of plane- symmetry. Combining the wave aberration theory of the Lu plane symmetric grating system and the root mean aquare aberration evaluation function, the multi-parameter objective function for optimizing the XUV optical system is obtained. In order to solve the objective function with multiple independent variables and a large value interval, a real-coded genetic algorithm based on decimal is developed in this paper, and it is used for the optimization of two XUV optical systems. The optimized value obtained is traced with the optical simulation software Shadow, and compared with the reference. The results show that the optical system optimized in this paper has a significant improvement in imaging quality, indicating that the wave aberration theory and the real-coded genetic algorithm in this paper are effective in optimizing the XUV optical system, which provides a new idea for the optimal design of such systems. |
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