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| 基于保偏镜组的外差干涉测量几何误差分析 |
| Geometric error analysis of heterodyne interferometer based on polarization-maintaining retroreflector |
| 投稿时间：2022-12-26 |
| DOI：10.3969/j.issn.1005-5630.2023.003.004 |
| 中文关键词: 偏振分光棱镜 角锥棱镜 非线性误差 激光干涉 误差分析 |
| 英文关键词:polarization beam splitting prism corner prism nonlinear error laser interference error analysis |
| 基金项目:国家自然科学基金联合基金（U1832172）；上海市科技重大专项（2017SHZDZX02）；中科院“BR计划”人才项目(2018)；国家自然科学基金（61975111） |
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| 中文摘要: |
| 角锥棱镜由于本身缺陷会导致失偏效应。在平面镜外差干涉仪中，使用一种保偏反射镜组替代角锥棱镜，以减小外差干涉仪的非线性误差。根据这个平面镜外差干涉仪的基本光路图，基于偏振分光棱镜和角锥棱镜的基本光学特性，分析了平面镜外差干涉仪中3个偏振分光棱镜偏摆角、仰俯角和滚动角，保偏反射镜组中2个偏振分光棱镜之间的间距和角度，以及角锥棱镜的偏摆角和仰俯角等误差对干涉仪的影响。推导出外差干涉仪中各个光学元件的最大安装误差，并规定好其加工精度，确保外差干涉仪性能。 |
| 英文摘要: |
| In order to reduce the nonlinear error of the heterodyne interferometer, a polarization-maintaining retroreflector is used in a plane mirror heterodyne interferometer instead of a corner prism due to its defects. According to the basic optical path diagram of the plane mirror heterodyne interferometer, based on the basic optical characteristics of the polarization beam splitter and the corner cube, the effects of the yaw angle, the pitch angle and the rolling angle of the three polarization beam splitters in the plane mirror heterodyne interferometer, and the spacing and angle between the two polarization beam splitters in the polarization-maintaining retroreflector, and the yaw angle and pitch angle of the corner prism on the interferometer were analyzed. The maximum installation error of each optical component in the heterodyne interferometer is deduced, and its machining precision is specified to ensure the performance of the heterodyne interferometer. |
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