|
| 基于柔性聚合物薄膜的低维材料定点转移研究 |
| Research on a fixed-site transfer method for low-dimensional materials based on flexible polymer film |
| 投稿时间：2022-06-19 |
| DOI：10.3969/j.issn.1005-5630.2022.006.010 |
| 中文关键词: 转移系统 定点转移 半导体纳米线 过渡金属硫化物 同质结 |
| 英文关键词:transfer system fixed-site transfer semiconductor nanowires transition metal dichalcogenides homostructure |
| 基金项目:国家自然科学基金优秀青年科学基金 (62122054) |
|
| 摘要点击次数: 2564 |
| 全文下载次数: 1509 |
| 中文摘要: |
| 针对目前低维材料转移方案中过程复杂和衬底适应性差的难题，提出了一种常温常压下基于柔性聚合物薄膜聚二甲基硅氧烷（polydimethylsiloxane, PDMS）的低维材料定点转移方法。PDMS柔性膜的受力形变是实现其与不同衬底紧密贴合的基础，针对不同的目标衬底，仅需要更换对应的衬底微调系统盖板，结合三维位移机械系统，即可实现一维和二维材料的通用定点转移。该方法避免了转移过程中的真空吸附及衬底加热等严格条件，降低了材料的定点转移难度并提高了其稳定性和通用性。此外该方法也可实现低维材料同质结或其它垂直结构的构建，从而极大提高低维材料结构的丰富性。 |
| 英文摘要: |
| To address the challenges of complex process and poor substrate adaptability in current low-dimensional material transfer schemes, a fixed-site transfer method based on flexible polymer film polydimethylsiloxane (PDMS) is proposed in this paper. The deformation of PDMS flexible film is the basis for its close adhesion to different substrates. For different target substrates, only the corresponding substrate micro-adjustment system cover plate need to be replaced, and in combination with the three-dimensional displacement mechanical system, the universal fixed-point transfer of one-dimensional and two-dimensional materials is realized. This method avoid the strict conditions of vacuum adsorption and substrate heating during the transfer process, which effectively reduce the difficulty of the fixed-point transfer of low-dimensional materials and improve the transfer stability and versatility. In addition, this method also enable the construction of homogeneous junctions or other vertical structures of low-dimensional materials, thus greatly improving the structural richness of low-dimensional materials. |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
