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| 倾斜入射下的单截面平面度绝对检验 |
| Single-section absolute flatness testing using oblique incidence method |
| 投稿时间：2021-11-01 |
| DOI：10.3969/j.issn.1005-5630.2022.03.002 |
| 中文关键词: 光学计量 倾斜入射 平面度 绝对检验 二次反射棱镜 |
| 英文关键词:optical metrology oblique incidence test flatness absolute measurement secondary reflection prism |
| 基金项目:国家自然科学基金（61875087） |
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| 摘要点击次数: 2059 |
| 全文下载次数: 1838 |
| 中文摘要: |
| 针对大尺寸光学平面的直线度的纳米级测量精度需求，提出了倾斜入射下单截面平面度绝对检验方法，实现了对超过相移干涉仪口径的长平晶绝对检验。利用棱镜转向实现倾斜入射角度的精密预标定，棱镜标定角度的精度高于圆光栅和图像分析等方法，可提高测量不确定度到0.0042 μm。对比了常规三面互检绝对检验结果与本方法的差异，在相同尺寸下，直线度误差仅为1.2 nm。在确认标定反射镜位置后，整个倾斜入射的干涉图调整过程将被完全集中到待测长平晶的工作面上，不需要再对反射平晶进行操作。调整长平晶时各个维度的操作互不干涉，可快速简便地得到测量结果。 |
| 英文摘要: |
| In order to satisfy the nanometer measurement accuracy requirements of the straightness of large-scale optical planes, a method of single-section flatness testing based on oblique incidence is proposed. The absolute inspection of long optical flat is realized which is beyond the aperture of phase-shift interferometer. It can detect long optical flat beyond the aperture of phase-shift interferometer, using right angle prism can get precise pre-calibration of oblique incidence angle, which is higher than that using circular grating，image analysis and other methods. The measurement uncertainty can be improved to 0.0042 μm. By comparing the absolute testing results of three-sided mutual inspection and this method, the straightness error is 1.2 nm. After calibrating the mirror position, it is completely concentrated on the working aperture of long optical flat to be measured after the adjustment of the oblique incidence interferogram. There is no need to operate on the reflection optical flat. The operations of each dimension do not interfere with each other. The results can be obtained quickly and simply. |
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