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| 离轴抛物面的对比测量 |
| Contrastive measurement of off-axis paraboloids |
| 投稿时间：2021-11-22 |
| DOI：10.3969/j.issn.1005-5630.2022.01.003 |
| 中文关键词: 离轴抛物面 无像差点法检测 Luphoscan 动态干涉仪 |
| 英文关键词:off-axis paraboloid stigmatic null test Luphoscan dynamic interferometer |
| 基金项目:国家自然科学基金（61875087） |
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| 中文摘要: |
| 采用离轴角度90°、口径1 inch的离轴抛物面作为样品，比对了传统零位干涉测量结果和非接触式3D非球面光学面形测量系统Luphoscan之间的差异。利用Zemax仿真了离轴抛物面六个维度的调整误差对测量结果的影响，分析了离轴量误差在两种完全不同测量过程中的表现形式，解决了Luphoscan测量结果可用性问题。根据仿真结果搭建动态干涉仪的零位检验干涉光路，建立了离轴抛物面的六个维度调节标准流程，可快速消除调整误差和离轴量误差，多次复现性测试结果达到了pv=0.135λ的精度。 |
| 英文摘要: |
| An off-axis paraboloid with an off-axis angle of 45° and a diameter of 1 inch was used as the sample to compare the difference between the traditional null interferometric measurement results and the non-contact 3D aspheric optical surface shape measurement system Luphoscan. Zemax was used to simulate the influence of the adjustment errors of the six dimensions of the off-axis paraboloid on the measurement results. The expression of off-axis error in the two completely different measurement processes was analyzed, which solved the problem of the availability of Luphoscan measurement results. According to the simulation results, the null test interference optical path structure based on the dynamic interferometer was set up, and the six-dimensional adjustment standard process of the off-axis paraboloid was established, which could quickly eliminate the adjustment error and off-axis quantity error, and the repeatability test results reach the accuracy of pv=0.135λ. |
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