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| 低波数高分辨率微型光栅光谱仪的设计 |
| Design of low wavenumber broadband grating spectrometer system |
| 投稿时间：2021-06-11 |
| DOI：10.3969/j.issn.1005-5630.2021.05.010 |
| 中文关键词: 光栅 光谱仪 像差理论 分辨率 光学设计 |
| 英文关键词:grating spectrometer aberration theory resolution optical design |
| 基金项目:国家重点研发计划（2016YFF0101603） |
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| 摘要点击次数: 2482 |
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| 中文摘要: |
| 为了满足光栅型光谱仪高分辨率、小型化以及宽谱段的需求，设计了一种基于Czerny-Turner（C-T）型光路结构的拉曼光谱仪。通过Zemax光学设计软件对聚焦镜、准直镜、柱面镜、CCD的倾角和间距进行了自动优化，并设置合理操作数来消除系统的球差和彗差，利用柱面镜来消除系统像散。所设计的拉曼光谱仪波段范围在80～ 3 200 cm-1，运用了Zemax操作数平衡光谱仪分辨率、工作波段和体积三个重要指标。设计结果表明，该仪器在785 nm波长激发下，全波段光谱分辨率优于3 cm-1，光学结构体积为70 mm×80 mm×25 mm。 |
| 英文摘要: |
| In order to meet the needs of high resolution, miniaturization and wide spectrum of grating spectrometer, a Raman spectrometer based on Czerny-Turner (C-T) optical structure was designed. The inclination and spacing of the focusing lens, collimating lens, cylindrical mirror and CCD are automatically optimized by Zemax optical design software. The spherical aberration and coma of the system are eliminated by setting reasonable operation number, and the astigmatism of the system is eliminated by using cylindrical mirror. In the range of 80～3200 cm-1, Zemax operands are used to balance the resolution, working band and volume of Raman spectrometer. The design results show that the full band spectral resolution of the instrument is better than 3 cm-1 and the optical structure volume is 785 nm when the wavelength is 70 mm×80 mm×25 mm. |
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