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| 高折射率镀膜聚合物波导传感器的制备 |
| Preparation of high-refractive-index film coated polymer waveguide fiber sensor |
| 投稿时间：2021-03-23 |
| DOI：10.3969/j.issn.1005-5630.2022.01.013 |
| 中文关键词: Ta2O5镀膜 COMSOL Multiphysics? 聚合物光波导 倏逝波传感 |
| 英文关键词:Ta2O5 coating COMSOL Multiphysics? polymer waveguide evanescent wave sensing |
| 基金项目:上海市自然科学基金会面上项目（20ZR437400） |
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| 中文摘要: |
| 为了提高利用倏逝波传感的光纤传感器的灵敏度问题，仿真并验证了一种基于高折射率镀膜的光纤传感器。首先两根光纤之间利用激光诱导波导自行成技术形成聚合物波导，并在波导表面镀上一层高折射率Ta2O5薄膜以增强波导表面倏逝波强度，从而增加传感器灵敏度。根据聚合物波导制备结果，使用COMSOL Multiphysics?软件对Ta2O5的厚度进行优化和仿真，并根据此仿真结果选取70，100和150 nm 3种厚度制备高折射率镀膜聚合物波导传感器。光谱测量结果表明，Ta2O5膜在100 nm厚度下，该传感器对罗丹明B水溶液可获得吸收光谱1×10?8 g/mL的检测极限。该传感器具有成本低、体积小、制作简单、灵敏度高的优点，在各个领域拥有广阔的应用前景。 |
| 英文摘要: |
| To improve the sensitivity of optical waveguide sensor based on evanescent wave sensing, a kind of high-refractive-index film coated waveguide optical fiber sensor is proposed by simulation and verified by experiment. In this study, we propose an optical fiber-waveguide-fiber EF sensing platform, which composes of a Ta2O5 coated polymer waveguide sandwiched by two multimode optical fibers, to enhance the intensity of evanescent wave and increase the sensitivity of the sensor. Through simulation results, the Ta2O5 film thickness was optimized. We selected 70 nm, 100 nm and 150 nm thickness for the coating experiments. With the coating thickness of 100 nm, we achieved absorption spectrum limit of detection for Rh B of 1×10?8 g/mL. The sensor has the advantages of low cost, small volume, simple manufacture and high sensitivity, which can be widely used in various fields. |
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