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| 面板检测用显微镜光学系统设计 |
| Design of microscope optical system for panel inspection |
| 投稿时间：2020-10-27 |
| DOI：10.3969/j.issn.1005-5630.2021.01.007 |
| 中文关键词: 面板检测 科勒照明 显微镜 Lighttools软件 |
| 英文关键词:panel inspection Kohler illumination microscope Lighttools software |
| 基金项目:深圳市海外高层次人才资金资助项目（KQTD2016053116451329） |
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| 中文摘要: |
| 为了实现对面板上缺陷精细分析和分类，设计了可见光波段、数值孔径为0.42的复消色差平场显微物镜和照明光学系统。通过合理结构优化、光焦度分配和材料的选择，优化出平场复消色差物镜，使其MTF曲线接近衍射极限。采用科勒照明匀光方案，设计照明光学系统，并用Lighttools软件对照明光学系统进行仿真。实验表明，光学系统分辨率达到0.775 μm，在成像视场范围内照明均匀性可以达到98%以上。设计结果与实际测试结果一致，可满足高精度面板检测使用要求。 |
| 英文摘要: |
| In order to achieve the fine analysis and classification of the defects on the panel, the apochromatic objective with a numerical aperture of 0.42 in the visible spectrum and illumination optical system were designed. First, the objective lens was designed with reasonable structure optimization, optical focal length distribution and material selection, and the MTF curve is closed to the diffraction limit. Secondly, the illumination optical system is designed by the scheme of Kohler illumination. Simulating optical system with Lighttools software.The experimental results show that the resolution of the optical system can reach 0.775 μm and the illumination uniformity can reach 98%. The results are consistent with the actual test results and meet the requirements of high-precision panel inspection. |
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