|
| 四自由度同步外差干涉测量系统设计 |
| A heterodyne interferometry for simultaneous measurement of four degrees of freedom |
| 投稿时间：2020-03-07 |
| DOI：10.3969/j.issn.1005-5630.2020.04.012 |
| 中文关键词: 多自由度测量 外差干涉测量 差分波前传感 楔面棱镜 可溯源 |
| 英文关键词:multi-degree-of-freedom measurement heterodyne interferometry differential wavefront sensing wedge-shaped prism traceable |
| 基金项目:国家重点研发计划（2016YFF0101603） |
|
| 摘要点击次数: 2857 |
| 全文下载次数: 2217 |
| 中文摘要: |
| 针对多自由度测量技术中存在的测量范围有限、精度低和阿贝误差等问题，设计了一种大行程、高精度、可溯源、四自由度同时测量的外差干涉测量系统。采用碘稳频532 nm固体激光器作为测量仪光源，结合光纤耦合技术对双频光进行空间分离。使用差分波前传感技术实现位移、俯仰角和偏转角的同步检测，并采用楔面棱镜测量直线度的变化。该测量系统可以抑制双频光混叠引起的非线性误差，行程范围为6 m，位移分辨率为0.13 nm，俯仰角和偏转角分辨率为0.026 μrad，直线度分辨率为14.88 nm，测量结果具有可溯源性。 |
| 英文摘要: |
| Aiming at the problems of limited measurement range, low accuracy and Abbe error in multi-degree-of-freedom measurement technology, a large-travel, high-precision, traceable, four- degree-of-freedom simultaneous measurement of heterodyne interferometry was proposed. The miniaturized 532 nm solid-state laser with iodine frequency stability was used, and the optical fiber coupling technology was used to spatially separate the dual-frequency light. Differential wavefront sensing technology realized the simultaneous detection of displacement, pitch and yaw, and wedge prisms are used to measure the change in straightness. The measuring instrument can suppress the non-linear error caused by dual-frequency optical aliasing, and realize the measurement with a travel range of 6 m, a displacement resolution of 0.13 nm, a pitch and yaw angle resolution of 0.026 μrad, and a straightness resolution of 14.88 nm. The measurement results are traceable. |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
