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期刊信息
  • 主管单位:
  • 中国科学技术协会
  • 主办单位:
  • 中国仪器仪表学会、上海光学仪器研究所、中国光学学会工程光学专业委员会
  • 主  编:
  • 庄松林
  • 地  址:
  • 上海市军工路516号上海理工大学《光学仪器》编辑部
  • 邮政编码:
  • 200093
  • 联系电话:
  • 021-55270110
  • 电子邮件:
  • gxyq@usst.edu.cn
  • 国际标准刊号:
  • 1005-5630
  • 国内统一刊号:
  • 31-1504/TH
  • 邮发代号:
  • 单  价:
  • 15.00
  • 定  价:
  • 90.00
曲面上化学气相沉积的二维材料研究
Study of two-dimensional materials for chemical vapor deposition on curved surfaces
投稿时间:2019-09-17  
DOI:10.3969/j.issn.1005-5630.2020.04.007
中文关键词:  化学气相沉积法  二氧化硅微球  硒化钨
英文关键词:chemical vapor deposition (CVD)  Silica microspheres  WSe2
基金项目:国家自然科学基金(NSFC11604210)
作者单位E-mail
张维薇 上海理工大学 上海市现代光学系统重点实验室上海 200093  
曹元广 上海理工大学 上海市现代光学系统重点实验室上海 200093  
于佳鑫 上海理工大学 上海市现代光学系统重点实验室上海 200093 yujiaxin@usst.edu.cn 
摘要点击次数: 112
全文下载次数: 51
中文摘要:
      过渡金属硫系化合物二维材料因其体积小、直接带隙发光等特点,可作为微纳光学结构的优异介质材料而受到广泛关注。通过转移法得到的二维材料微纳光学结构,如光学微腔、微纳传感器等,容易引起材料污染和破损,对结构的功能特性影响很大。通过化学气相沉积法(CVD),将硒化钨直接沉积在6 μm直径的二氧化硅(SiO2)微球上,对微球上的材料进行成分表征,证明在微球上生长出了二维材料硒化钨,且证明了通过化学气相沉积法在曲面上沉积二维材料是可行的。这种化学气相沉积法直接生长的二维材料微纳球腔,有望应用于高性能光学传感器和微纳光源器件中。
英文摘要:
      Two-dimensional (2D) transition-metal dichalcogenides have attracted much attention because of its small size and direct band gap properties, which can be used as an excellent luminescent medium in micro-nano optical structures. The 2D materials based micro-nano structure, such as optical microcavity and micro-nano sensor, are always obtained by the transferring method. However, contaminations and damage to the materials are hard to be avoided during material transfer, which will greatly affect the functionality of the structure. Direct growth of the 2D material on the micro/nano structure can solve this problem. WSe2 is deposited directly on the surface of 6 μm-diameter SiO2 sphere cavities by chemical vapor deposition (CVD) method, the compositional characterization of the materials on the microspheres proved that WSe2 was grown on the microspheres, and it was proved that it is feasible to deposit two-dimensional materials on the curved surface by chemical vapor deposition. This 2D material based cavity is expected to be good candidates in high-performance optical sensors and light source devices. It also provides a basis for in-depth study of the exciton characteristics of two-dimensional materials in the high-strain condition induced by curved surface.
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