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| 真空紫外-极紫外反射率计控制与数据采集系统 |
| Control and data acquisition system for VUV-EUV reflectometer |
| 投稿时间：2020-02-23 |
| DOI：10.3969/j.issn.1005-5630.2020.03.011 |
| 中文关键词: 反射率计 LabVIEW 锁相放大器 数据采集 |
| 英文关键词:reflectometer LabVIEW lock-in amplifier data acquisition |
| 基金项目:国家自然科学基金创新研究群体基金（61621001）；国家自然科学基金面上项目（11875203） |
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| 中文摘要: |
| 针对自行研制的真空紫外-极紫外（VUV-EUV）波段反射率计运行需要，基于LabVIEW软件构建了该反射率计控制和数据采集系统。详细介绍该系统的组成和主要硬件单元模块的控制流程与方法，并给出准直调试程序和反射率数据采集程序的架构、用户界面和数据采集方法。提出的新数据采集算法有效提高了弱信号条件下反射率测量的可靠性。利用该控制与数据采集系统，对Si基板开展了准直校准与反射率测量实验。结果表明，在7.5°～87.5°范围内直通光电流信号为20 pA时仍能获得可靠的反射率，且基于入射光监测方法的反射率测量实验结果与理论计算相符更好。除在布儒斯特角附近信号电流小于本底电流0.7 pA时，反射率重复测量误差优于1.6%。 |
| 英文摘要: |
| Aiming at the operation needs of the self-developed vacuum ultraviolet-extreme ultraviolet (VUV-EUV) reflectometer, this reflectometer control and data acquisition system was constructed based on LabVIEW software. In this paper, the basic structure and function of the device are firstly introduced. In particular, the control flow and methods of the main hardware unit modules of the system are introduced in detail, including the framework, the program interface and the way for collecting data. This study proposes a new data acquisition algorithm that effectively improves the reliability of reflectance measurements, especially for measuring weak signals. Using this control and data acquisition system, a collimation calibration and reflectance measurement experiment was performed on a Si substrate sample. The results show that a reliable reflectance can still be obtained when the shoot-through photocurrent signal was as low as 20 pA in the range of 7.5°-87.5°, and the reflectance measurement results based on the incident light monitoring method are in good agreement with the theoretical calculations. When the signal current acquired at the angle around the Brewster angle is more than the background current by 0.7 pA, the repeatable measurement error of the reflectance is generally better than 1.6%. |
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