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  • 主管单位:
  • 中国科学技术协会
  • 主办单位:
  • 中国仪器仪表学会、上海光学仪器研究所、中国光学学会工程光学专业委员会
  • 主    编:
  • 庄松林
  • 地    址:
  • 上海市军工路516号上海理工大学《光学仪器》编辑部
  • 邮政编码:
  • 200093
  • 联系电话:
  • 021-55270110
  • 电子邮件:
  • gxyq@usst.edu.cn
  • 国际标准刊号:
  • 1005-5630
  • 国内统一刊号:
  • 31-1504/TH
  • 邮发代号:
  • 单    价:
  • 15.00
  • 定    价:
  • 90.00
散射式太赫兹扫描近场光学显微技术研究
Study on scattering-type terahertz scanning near-field optical microscopy
投稿时间:2019-05-10  
DOI:10.3969/j.issn.1005-5630.2020.02.011
中文关键词:  太赫兹  散射式扫描近场光学显微镜  外差探测
英文关键词:terahertz  scattering-type scanning near-field optical microscope  heterodyne detection
基金项目:
作者单位E-mail
岳东东 上海理工大学 光电信息与计算机工程学院上海 200093  
游冠军 上海理工大学 光电信息与计算机工程学院上海 200093 youguanjun@126.com 
摘要点击次数: 2
全文下载次数: 3
中文摘要:
      基于散射式近场探测原理,设计并搭建了散射式太赫兹扫描近场光学显微系统(THz s-SNOM),实现了纳米量级空间分辨率的太赫兹近场显微成像测量。该系统以输出频率范围为0.1~0.3 THz的太赫兹倍频模块为发射源,通过纳米探针的针尖产生纳米光源与样品相互作用,并将样品表面的倏逝波转化为可在远场测量的辐射波。通过探针逐点扫描样品表面,同时获得了样品表面的形貌图和太赫兹近场显微图。该系统的显微分辨率取决于探针针尖的曲率半径,而与太赫兹波的波长无关。使用该系统测量了金薄膜/硅衬底样品和石墨烯样品的近场显微图,结果表明,近场显微的空间分辨率优于60 nm,波长与空间分辨率之比高达λ/26 000。
英文摘要:
      Based on the theory of near-field scanning detection, a scattering terahertz scanning near-field optical microscopy (THz s-SNOM) system is designed and built. The system achieves nanoscale spatial resolution, breaking the diffraction limit. Using a frequency multiplier module with an operating frequency of 0.1−0.3 THz as the emission source, the THz beam is focused onto the tip of an atomic force microscope (AFM) probe. The tip of the needle acts as a nano-light source, interacting with the sample. After the evanescent waves are converted into radiation waves, they are collected by the parabolic mirrors and imaged point by point in the far field. The topography image of the sample surface and the near-field amplitude map without background can be obtained simultaneously. The resolution of the system depends on the tip radius of the AFM probe, which is independent on the wavelength of the beam used. The near-field image obtained by scanning different samples shows that the resolution is less than 60 nm and spatial resolution achieves λ/26 000.
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