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| 锥形内表面干涉测量误差分析 |
| Error analysis of cone inner surface in the interferometric measurement |
| 投稿时间：2018-05-10 |
| DOI：10.3969/j.issn.1005-5630.2019.02.005 |
| 中文关键词: 干涉测量 锥形内表面 误差分析 |
| 英文关键词:interferometric measurement conical frustum inner surface error analysis |
| 基金项目:国家重点研发计划项目（2016YFF0101900） |
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| 中文摘要: |
| 为了实现对回转锥形内表面的形貌精密测量，分析了干涉测量中误差产生的原因，明确了误差对测量结果造成的影响。通过在圆柱坐标系下建立数学模型，推导出偏移误差和角度误差的数学公式，并对误差公式进行分析。结果表明：圆锥反射镜的偏移量和顶角的加工误差都会造成光程差；当偏移量极小时，光程差与反射镜偏移量成线性关系；光程差对于角度误差非常敏感，为了保证测量精度，需要严格控制圆锥反射镜的顶角大小。 |
| 英文摘要: |
| To achieve high-precision cone inner surface measurement, it is necessary to identify the cause of error and analyze the influence of the error on the measurement result. By building the mathematical model in the cylindrical coordinate system, the formulas of offset error and angle error are derived. The result shows that the optical path difference is caused obviously by offset error and angle error of cone mirror. When the offset is extremely small, the optical path difference changes linearly with the offset. The optical path is very sensitive to angle error. To ensure the measurement accuracy, the apex angle of cone mirror must be strictly controlled. |
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