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| 一维矩形光栅AFM图像盲探针表面重建模拟研究 |
| Simulation of surface reconstruction of the one-dimensional rectangle grating AFM images by blind reconstructed tip |
| 投稿时间：2017-11-15 |
| DOI：10.3969/j.issn.1005-5630.2018.03.010 |
| 中文关键词: 一维矩形光栅 原子力显微镜 盲重建 |
| 英文关键词:one dimensional rectangle grating atomic force microscope blind reconstruction |
| 基金项目:广西高校光电信息处理重点实验室开放基金（KFJJ2014-01）；中央高校基础研究能力提升计划；国家自然科学基金地区科学基金项目（61565004） |
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| 中文摘要: |
| 探针结构参数的合理选取将直接决定扫描图像及其盲探针修正图像的失真程度。基于此，以一维矩形模拟光栅为典型案例，对该模拟光栅的原子力显微镜（AFM）扫描成像过程与盲探针修正过程进行了仿真，阐明了探针结构参数对扫描成像过程与盲探针修正过程的影响规律。通过建立线宽变化度与半高宽相结合的图像重建误差评价指标，确定了针对该模拟光栅的AFM探针建议结构参数，并取得了良好的光栅图像重建效果。研究表明，应用线宽变化度结合半高宽来综合评价光栅的AFM测量和图像重建过程，有利于提升实际光栅AFM图像盲探针重建的准确度。 |
| 英文摘要: |
| Reasonable selections of probe structure parameters will directly determine the distortion of the scanned images and the corrected images by blind reconstructed tip.Therefore,this study has adoptedone-dimensional rectangle simulated grating as a typical case,theoretically simulated atomic force microscope(AFM) scanned process and AFM images correction process of the simulated grating by reconstructed tip.Afterwards,the influence of probe structure parameters on the scanned process and corrected process by reconstructed tip is analyzed.By establishing variation degree of linewidth combined with full width at half maximum(FWHM) of reconstructed AFM images error evaluation index,the suggested structure parameters of probe for the simulated grating are determined and a good reconstruction image is obtained.In conclusion,application of linewidth variation degree combined with FWHM to evaluate the process of AFM measurement and image reconstruction of grating is helpful to improve the accuracy of the reconstruction image of grating by reconstructed tip. |
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