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| 光学非球面磁性复合流体抛光运动控制及误差分析 |
| The control and error analysis for magnetic compound fluid polishing of optical aspheric components |
| 投稿时间：2017-12-01 |
| DOI：10.3969/j.issn.1005-5630.2018.02.005 |
| 中文关键词: 磁性复合流体 光学非球面 误差分析 路径规划 |
| 英文关键词:magnetic composite fluid optical aspheric error analysis path planning |
| 基金项目: |
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| 摘要点击次数: 4680 |
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| 中文摘要: |
| 针对精密光学系统中对高精度光学非球面元件的加工需求，设计磁性复合流体抛光的直线光栅式运动轨迹，并通过运动轨迹和非球面方程计算出各抛光加工点坐标。根据工件表面形貌和抛光头运动姿态设计了抛光加工路径，建立各抛光加工点间的弓高误差模型，通过模型对工件表面弓高误差变化规律进行仿真分析。仿真结果表明，弓高误差会随着Y轴上步长的增大而增大。这对非球面超精密加工具产生了深远的影响，促进了光学元件超精密高效制造技术的发展。 |
| 英文摘要: |
| In order to meet the requirement of the processing of high-precision aspheric optical elements in the optical systems,the linear grating motion trajectory of magnetic composite fluid polishing is designed.According to the motion trajectory and the aspheric equation,the coordinates of each polishing processing point are calculated.The polishing path is designed according to the surface topography and the polishing head which is relative to the geometry of the workpiece.The model of high-height error between each polishing point is established,and the variation of the surface arch error of workpiece is simulated by the model.The arch error increases with the increase in the Y dimension. |
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