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| 光学元件表面缺陷检测方法研究现状 |
| Study on surface defect detection method of optical element |
| 投稿时间：2017-06-20 |
| DOI：10.3969/j.issn.1005-5630.2018.01.014 |
| 中文关键词: 光学元件 表面缺陷 数字图像处理 机器视觉 |
| 英文关键词:optical components surface defects digital image processing machine vision |
| 基金项目:国家自然科学基金资助项目（51375094）；清华大学摩擦学国家重点实验室开放基金资助项目（SKLTKF13B02）；福建省自然科学基金资助项目（2015J01195） |
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| 中文摘要: |
| 随着科学技术的发展，人们对光学元件的表面粗糙度和表面面形精度提出了越来越高的要求，光学元件表面缺陷检测技术也受到了广泛重视。通过简述表面缺陷的类型，强调了缺陷给光学系统带来的危害，由此分析和讨论了目前国内外对光学元件疵病的检测方法，并指出各种方法的优缺点，同时对机器视觉技术在疵病检测方面的应用进行了介绍，还探讨了光学元件表面缺陷检测技术未来发展需要注意解决的问题。 |
| 英文摘要: |
| With the development of science and technology,the surface roughness and surface shape accuracy of optical components has an highly increasing demand.The surface defect detection technology of ptical components has also attracted great interests.By analyzing the types of surface defects and emphasizing the harm caused by the defects to the optical system,this paper analyzes and discusses the detection methods of optical components at home and abroad,and points out the advantages and disadvantages of various methods.At the same time,technology in the defect detection research has been introduced to explore the problem in the future development. |
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