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| 金相显微镜上实现三维微观形貌恢复 |
| Recovery of three-dimensional microscopic morphology by metalloscope |
| 投稿时间：2015-12-16 |
| DOI：10.3969/j.issn.1005-5630.2016.05.003 |
| 中文关键词: 金相显微镜 聚焦形貌恢复 三维微观形貌恢复 |
| 英文关键词:metalloscope shape from focus recovery of three-dimensional microscopic morphology |
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| 中文摘要: |
| 金相显微镜是一种经典的测量分析仪器，已经实现了金相显微镜图像的数字化采集，并恢复了三维微观形貌。首先，对金相显微镜的载物台加装电机，利用电机带动载物台进行精密移动，在载物台移动过程中，对被测物体等步距拍摄序列图像。然后，根据聚焦形貌恢复的原理，采用修正的拉普拉斯算子进行聚焦程度判断，利用高斯插值方法获取聚焦程度最大值以及此时被测表面的高度信息，恢复三维形貌。最后，利用金相显微镜对粗糙度样块进行测量，获得了相符的测量结果。该方法对于扩展金相显微镜的测量范围具有积极意义。 |
| 英文摘要: |
| Metalloscope is a classical measurement instrument.The images of the object are collected digitally and the 3D microscopic morphology is acquired.Firstly,a motor is added to the object stage to drive it with high precision.The sequence images of the test sample are captured by the moving stage at a constant interval.Then based on the principle of shape from focus,the modified Laplacian operator is used to judge the quality of the focused images.The maximum focus degree and the corresponding height information are calculated by the Gaussian interpolation algorithm and the three-dimensional profile is obtained.At last,the surface roughness specimens are measured and the results are consistent with the standard values.The method is of great significance for extendmg the application of metalloscopes. |
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