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| 基于超分辨图像复原的显微圆孔孔径测量方法 |
| Microscoic pore size measurement based on super-resolution image restoration |
| 投稿时间：2015-12-24 |
| DOI：10.3969/j.issn.1005-5630.2016.05.002 |
| 中文关键词: 显微测量 超分辨图像复原 圆孔边缘判据 核孔膜 |
| 英文关键词:microscopic measurement super-resolution image restoration circle edge-setting criterion nuclear track-etched membrane |
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| 摘要点击次数: 3349 |
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| 中文摘要: |
| 为提高圆孔的光学显微测量准确性，研究了基于超分辨图像复原的显微圆孔孔径测量方法。该方法通过超分辨图像复原处理圆孔显微图像，提高了传统光学显微系统对圆孔成像的分辨率，确定了以超分辨复原图像灰度值为0.399作为圆孔物理边缘判据，实现对圆孔边缘的准确探测。理论分析表明该方法可准确测量微米级及以上直径圆孔。核孔膜孔径测量实验中，由二值化图像得到孔径测量结果为6.35 μm（测量不确定度为0.08 μm），与扫描电镜测量结果6.268 μm（测量不确定度为0.083 μm）相符，测量误差仅0.08 μm。该技术有助于实现对圆孔形状的快速、准确在线测量。 |
| 英文摘要: |
| An optical microscopy for pore size measurement based on super-resolution image restoration is proposed to obtain an accurate measurement.The method facilitates the fast and accurate online inspection of pore structure.By super-resolution image restoration, the lateral resolution of the pore image is significantly improved,yielding a reasonable circle edge-setting criterion of 0.399,and achieving precise pore edge detection.Theoretical analysis shows that the proposed method can measure the pore with diameter of micron magnitude and higher.The nuclear track-etched membrane pore size measurement result obtained by the proposed method is 6.35 (0.08) μm,which agrees well with the scanning electron microscope result of 6.268 (0.083) μm,and the measurement error is 0.08 μm. |
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