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| 多层膜Laue透镜对10 keV硬X射线聚焦性能的理论计算 |
| Calculation on focusing performance of hard X-ray multilayer Laue lens with 10 keV X-ray |
| 投稿时间：2015-03-09 |
| DOI：10.3969/j.issn.1005-5630.2015.06.014 |
| 中文关键词: X射线 多层膜Laue透镜 衍射动力学 衍射效率 高级次 |
| 英文关键词:X-ray multilayer Laue lens dynamical diffraction theory diffraction efficiency high order |
| 基金项目:国家自然科学基金大科学装置联合重点项目(U1432244) |
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| 中文摘要: |
| 采用NbC/Si材料组合设计多层膜Laue透镜,总膜厚为40μm,利用衍射动力学理论分析多层膜Laue透镜对硬X射线的衍射效率及聚焦分辨率。通过两种方法提高多层膜Laue透镜的分辨率。第一种方式是减小膜层的最外层宽度,该方法要求结构必须是楔型结构,制备极其困难。第二种方法是使用多层膜Laue透镜的高级次,该方法在不增加制备难题的前提下能有效提高分辨率。通过使用多层膜Laue透镜的-3级次,对10 keV硬X射线获得了分辨率为6.72 nm,衍射效率为49.31%的聚焦光斑。 |
| 英文摘要: |
| The dynamical diffraction theory is employed to analyze the diffraction efficiency and the resolution ratio of hard X-ray waves inside the multilayer Laue lenses. The multilayer Laue lenses are made from NbC/Si with a zone thickness of 40μm. There are two ways to improve the resolution ratio. The first way is to reduce the outmost zone thickness and use wedge structure, but it is hard to form the structure. The second way is to use the high order. This way can improve the resolution ratio without changing the structure. The results show that a focused beam size of 6.72 nm and a mean efficiency of 49.31% can be obtained by the -3rd order of multilayer Laue lens with 10 keV X-ray. |
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