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| 用于柱面镜面形检测的CGH的设计与误差分析 |
| Design and production error analysis of CGH for testing the cylinder surface |
| 投稿时间：2015-02-11 |
| DOI：10.3969/j.issn.1005-5630.2015.05.009 |
| 中文关键词: 二元线性光栅 计算全息图(CGH) 标量衍射 ZYGO干涉仪 |
| 英文关键词:binary linear grating computer generated hologram(CGH) scalar diffraction ZYGO interferometer |
| 基金项目:中国科学院空间科学战略性先导科技专项资助项目(XDA04060605) |
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| 中文摘要: |
| 现代X射线掠入射成像式望远镜是由大量的圆柱面超薄玻璃镜面经压制成圆锥面组成的准Wolter-I型望远镜。为了完成超薄玻璃圆柱面的检测,设计了适用于干涉检测的计算全息图(CGH)。结合CGH的设计制作过程,分析了CGH的基底面形误差、刻蚀占空比误差、刻蚀位置误差、刻蚀深度等误差,并对占空比、刻蚀深度的参数做了具体的分析,通过对制作误差的分析选择了制作参数。采用设计制作的CGH和ZYGO干涉仪实现了X射线望远镜用柱面镜的检测,检测结果达到了柱面镜的使用要求。 |
| 英文摘要: |
| Modern X-ray grazing incidence imaging telescope consists of a large number of conical surfaces pressed from cylindrical surfaces. In order to test figure error of the cylinder surface, the design of computer generated hologram(CGH) is achieved. Combined with the design and production process of CGH, we study the substrate surface figure error of CGH, etching duty cycle, etching position and etching depth. The cylindrical surfaces were tested in the X-ray telescope using the ZYGO interferometer and CGH. The results show that the figure error of cylinder surfaces meets the requirements of the mirrors of X-ray telescope. |
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