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期刊信息
  • 主管单位:
  • 中国科学技术协会
  • 主办单位:
  • 中国仪器仪表学会、上海光学仪器研究所、中国光学学会工程光学专业委员会
  • 主  编:
  • 庄松林
  • 地  址:
  • 上海市军工路516号上海理工大学《光学仪器》编辑部
  • 邮政编码:
  • 200093
  • 联系电话:
  • 021-55270110
  • 电子邮件:
  • gxyq@usst.edu.cn
  • 国际标准刊号:
  • 1005-5630
  • 国内统一刊号:
  • 31-1504/TH
  • 邮发代号:
  • 单  价:
  • 15.00
  • 定  价:
  • 90.00
基于光学扫描法的导轨直线度测量方法
Straightness measurement of guide rail based on optical scanning method
投稿时间:2014-08-20  
DOI:10.3969/j.issn.1005-5630.2015.02.001
中文关键词:  扫描测量  直线度  三测头法  倾角补偿
英文关键词:scanning measurement  straightness  three-probe method  tilt compensation
基金项目:
作者单位E-mail
房传明 苏州大学 机电工程学院, 江苏 苏州 215006  
陈长军 苏州大学 机电工程学院, 江苏 苏州 215006 chjchen2001@aliyun.com 
摘要点击次数: 3974
全文下载次数: 3312
中文摘要:
      基于多测头光学扫描法对导轨直线度的在位测量方法,提出一种新的倾角补偿的三测头扫描方法.介绍了测量原理,推导了基于最小二乘法的直线度形状重构方法,重构出的形状可精确反映直线度误差的高频成分,且对测量噪声有良好抑制能力.对算法进行了仿真验证,并由实验验证了提出方法的有效性.实验结果表明,该方法可以精确地还原出台阶状的直线度形状,测量标准偏差在10 μm以内.
英文摘要:
      An online measurement method of straightness is studied based on multi-probe optical scanning method. A three-probe scanning method with tilt compensation is proposed. Reconstructed form can accurately express the high frequency elements of the straightness error, and owns better suppression capability of the measurement noise. The measurement principle of the proposed method is introduced firstly. The construction algorithm of the straightness errors is deduced based on the least square solution and the computer simulation is performed. The experimental system is built for verificating the validity of the proposed method. The experimental results show that the proposed method can accurately reconstruct the straightness errors of step form, and the standard deviation is less than 10 micrometer.
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