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| 微束XRF系统中X射线聚焦光学元件研究 |
| Study on the optical components for focusing X-ray in micro XRF system |
| 投稿时间：2014-01-21 |
| DOI：10.3969/j.issn.1005-5630.2014.03.011 |
| 中文关键词: X射线荧光分析系统 聚焦毛细管透镜 组合折射透镜 |
| 英文关键词:X-ray fluorescence system focusing capillary lens compound refractive lens |
| 基金项目:教育部博士点基金（20133317110006）；国家国际科技合作项目（2012DFR10510） |
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| 中文摘要: |
| 高性能X射线聚焦光学元件是实现亚微米分辨率微束X射线荧光分析系统（XRF）的关键器件。给出一种新型的微束XRF系统设计结构，介绍两种典型的X射线聚焦光学元件：X射线聚焦毛细管透镜和X射线组合折射透镜的结构与光学参数。数值计算比较了X射线聚焦毛细管透镜和X射线组合折射透镜的光学聚焦性能。分析结果体现了X射线聚焦组合透镜作为聚焦光学元件在焦斑大小、透过率、强度增益和检测范围等方面的优势。 |
| 英文摘要: |
| High performance optical components for focusing X-ray are the crucial part to realize the micro X-ray fluorescence system with the sub-microns spatial resolution. A novel structure of micro XRF is given and the optical parameters for both X-ray focusing capillary lens and X-ray compound refractive lens (CRL) are introduced. Main works of this paper focus on the numerical computing for the optical performance of capillary and CRL. Analysis results show that the X-ray CRL has the advantages in terms of focal spot size, transmittance, etc, when compared with capillary. |
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