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| 改进的迈克尔逊干涉仪测量薄膜厚度 |
| Film thickness measurement by improved Michelson′s interferometer |
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| DOI： |
| 中文关键词: 迈克尔逊干涉仪 力传感器 等倾干涉 抵消法 薄膜厚度 |
| 英文关键词:Michelson′s interferometer force sensor equal inclination interference offset method film thickness |
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| 中文摘要: |
| 为了测量未知折射率或不透明薄膜的厚度,借助力传感器对传统迈克尔逊干涉仪加以改进,并运用等倾干涉的原理结合抵消法设计了测量装置。薄膜被等厚的空气层所代替,通过间接测量,避开了机械螺旋空程差造成的影响,使用力传感器有效减小了挤压形变引起的误差。该装置测量范围为0.3 μm～1.5 mm,分辨力为0.3 μm。实测数据表明,该装置具有良好的重复性和准确性。 |
| 英文摘要: |
| For the measuring of the thickness of an opaque or refractivity unknown film a force sensor is added to the traditional Michelson′s interferometer. Employing the principle of equal inclination interference coupled with the offset method, the result is an improved measuring instrument. The film is replaced by a layer of air as substitution.Through indirect measurement,the lost motion effect is avoided.More over,the effect of pressing is greatly weakened by using the pressure sensor.The measuring range of this apparatus is between 0.3 μm and 1.5 mm,and the effective resolution reaches 0.3 μm.The result indicates that the improved device is of good repeatability and accuracy. |
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