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| 激光干涉仪在非球面光学元件制造中的应用 |
| The application of laser interferometer in aspheric optical element manufacturing |
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| DOI: |
| 中文关键词: 非球面 检测 干涉仪 相移 |
| 英文关键词:aspheric surface tection interferometer phase shifting |
| 基金项目: |
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| 摘要点击次数: 2905 |
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| 中文摘要: |
| 为了提高检测精度,研究了用激光干涉仪检测非球面光学元件的方法,阐述了激光干涉仪的工作原理。并通过实验证明了这种方法既简单方便,又适用于非球面度不高的光学元件。缩短了加工时间,减少了对专业人员的投资支出,因此大大提高了生产效率。 |
| 英文摘要: |
| In order to improve the accuracy of detection, the detection methods is studied which used laser interferometers to measure aspheric optical components, expounded the working principle of the laser interferometer. And it proved that the method is not only simple and convenient, but also applies to the aspheric degree not high optical element by experiment. It is shortened for processing time and reduced the rate of professional investment spending, thus it enhanced the production efficiency. |
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