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| 用虚光栅移相莫尔条纹法测量小球面曲率半径 |
| Measurement of the curvature radius of a small spherical surface with virtual grating phase shift Moiré fringe method |
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| DOI： |
| 中文关键词: 虚光栅 移相干涉术 莫尔条纹 空间载频干涉术 曲率半径 图像处理 |
| 英文关键词:virtual grating phase shift interferometry Moiré fringe spatial carrier interferometry curvature radius image processing |
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| 中文摘要: |
| 随着近代光学、光通信等领域的迅猛发展,光学元器件的微小化已成为一个重要的发展趋势。球面是微小光学元件常见的一种面形。研究了一种基于虚光栅移相莫尔条纹术测量小球面曲率半径的方法。实验以Askania环形球径仪配备的曲率半径为17.92mm的标准凸球面样板为例,利用干涉显微镜拍摄了一幅含有载频的被测球面非接触干涉图,通过运用4幅虚光栅、图像相乘、频域滤波和四步移相等算法得到了被测球面的曲率半径。测量均值为R=17.97mm。实验结果表明:用虚光栅移相莫尔条纹法测量小球面曲率半径是完全可行的。 |
| 英文摘要: |
| With the rapid development in modern optics, optical communications, etc., the miniaturization of optical components has become an important trend. Spherical surfaces are a kind of common profile. Virtual grating phase shift Moiré fringe method is adopted to measure the curvature radius of a standard small spherical template with nominal value of 17.92mm, equipped for an Askania spherometer. With an interference microscope, a spherical untouched carrier interferogram is taken. By utilizing 4 virtual gratings, image multiplication, frequency domain filtering, and 4 step phase shift algorithm, etc., the radius result, 17.97mm, is obtained. The experimental results show that virtual grating phase shift Moiré fringe method is entirely practicable for measuring the radius of a small spherical surface. |
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