|
| 脉冲激光溅射沉积技术的发展及其应用研究 |
| Research on development and application of pulsed laser deposition technology |
| |
| DOI: |
| 中文关键词: 脉冲激光溅射沉积(PLD) 功能薄膜 应用研究 |
| 英文关键词:pulsed laser deposition(PLD) functional films application research |
| 基金项目: |
|
| 摘要点击次数: 3985 |
| 全文下载次数: 374 |
| 中文摘要: |
| 薄膜材料已经在半导体材料、超导材料、生物材料等方面得到广泛应用。为了得到高质量的薄膜材料,脉冲激光溅射沉积(PLD)技术受到了广泛的关注。文中介绍了脉冲激光溅射沉积薄膜的基本原理及特点,分析了脉冲激光溅射沉积技术在制备高温超导膜、铁电薄膜、生物陶瓷薄膜等功能薄膜方面的应用研究。大量研究表明,脉冲激光溅射沉积是目前最好的制备薄膜的方法之一,具有很大的发展潜力和广泛的应用前景。 |
| 英文摘要: |
| Thin film materials have been widely used in the semiconductor materials, superconducting materials, biological materials and so on. In order to obtain high quality thin film materials, pulsed laser deposition (PLD) technology received great attention. In this paper, the basic principles and characteristics of pulsed laser deposition have been illustrated, and the research on applications of pulsed laser deposition in depositing high temperature superconducting films, ferroelectric thin films, bioceramic films and other functional films have been also analysed. A large number of studies have shown that pulsed laser deposition is one of the best methods of films preparation with great potential and broad prospect. |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
|
|
|