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| 声光式外差干涉仪的光路设计与分析 |
| Analysis and design of acousto optic heterodyne interferometer |
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| DOI: |
| 中文关键词: 声光调制器 外差干涉仪 光路调整 |
| 英文关键词:acousto optic modulator heterodyne interferometer optical adjustment |
| 基金项目: |
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| 中文摘要: |
| 制造业的发展迫切需要对高速加工过程中的物体进行测量和定位,利用声光调制法实现外差干涉能产生较高的频差可以实现高速测量。文中对声光式外差干涉仪的光路设计进行了分析,提出了空间分离一级衍射光和零级衍射光的一种方案,并且对光拍频的接收,光路的调整进行了分析,实验结果证明该实验系统可以用于外差干涉测量。 |
| 英文摘要: |
| Development of manufacturing industry urgently needs to measurement and location the objects in high speed machining processes. The acousto optic modulator can generate high frequency difference, so we can achieve high speed measurement by introducing acousto optic modulator into heterodyne interferometer. Optical design of acousto optic heterodyne interferometer has been analyzed in this article. A scheme was proposed to realize the space isolation of the first diffraction light and zero order diffraction light. The analysis of light beat reception and optical adjustment has been done. Test result proved the project can be used for heterodyne interferometer measurement. |
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