|
| 双重膜厚监控在中远红外光学镀膜工艺中的应用 |
| Application of duple monitor mode in the deposition of mid-IR and far-IR optical film |
| 修订日期:2006-07-13 |
| DOI: |
| 中文关键词: 双重监控 光学镀膜 膜厚监控 |
| 英文关键词:duple monitor mode,optical film coating,film thickness monitor mode |
| 基金项目: |
| 曹一鸣 王小辉 卫红 |
| 广州市光机电工程研究开发中心广东省现代控制与光机电技术公共实验室 广东广州510635 |
| 摘要点击次数: 2732 |
| 全文下载次数: 19 |
| 中文摘要: |
| 为提高中远红外增透膜镀膜工艺中膜厚监控的精度,对石英晶振监控和光学极值法监控进行了对比研究,分析了两者的优缺点.通过对两种监控方法的结合,在镀膜工艺中应用一种新的薄膜厚度监控方法--双重监控法.该方法适合于监控中长波段红外光学薄膜的沉积,提高了膜厚监控的精度. |
| 英文摘要: |
| For improving accuracy of film monitor system in mid-IR and far-IR reflection reducing coating process,quartz crystal libration monitor mode and optical extremum monitor mode are researched in this paper and their merits and drawbacks are discussed.A new film thickness monitor mode-duple monitor mode is applicated by combining two monitor modes.Duple monitor is suited to monitor the deposition of mid-IR and far-IR optical film, and it can improve accuracy of film monitor system. |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |