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| 椭偏光度法研究钛掺杂对二氧化硅介孔薄膜的光学性能的影响 |
| Spectroscopic ellipsometry characterization of mesoporous Ti-doped SiO2 films optical properties |
| 修订日期：2006-06-28 |
| DOI： |
| 中文关键词: 溶胶-凝胶法 介孔薄膜 椭偏光度法 光学常数 |
| 英文关键词:sol-gel,mesoporous,spectroscopic ellipsometry,optical constants |
| 基金项目:上海理工大学校科研和教改项目 |
| 岳春晓 姚兰芳 曲典 鲁凤芹 |
| 上海理工大学理学院 上海200093 |
| 摘要点击次数: 2456 |
| 全文下载次数: 22 |
| 中文摘要: |
| 采用溶胶-凝胶工艺,以表面活性剂十六烷基三甲基溴化铵CTAB为模板剂, 在常温常压下制备出介孔SiO2薄膜和钛掺杂介孔SiO2薄膜.用反射式椭圆偏振光谱仪测试出两种薄膜样品的椭偏参数,选用Cauchy模型对椭偏参数进行了较好的数据拟合,获得了在250～700nm波段光学常数的色散关系.紫外-可见-近红外分光光度计测量结果表明小比例钛下薄膜的吸收增强,透过性降低,光学性能发生较大变化. |
| 英文摘要: |
| Mesoporous SiO2 and mesoporous Ti-doped SiO2 films are prepared by the template-tailored sol-gel method using the surfactant of cetyltrimethylammonium bromide(CTAB) as the template at ambient pressure.Spectroscopic ellipsometer is used to characterize the optical properties of the films.And the Cauchy model is presented well in fitting spectroscopic ellipsometric data for the film optical constants in the wavelength range of 250~700nm.UV-VIS-NIR transmission spectroscopy results show that the absorbance of mesoporous Ti-doped SiO2 films increases and the transparency decreases compared to mesoporous SiO2 films,and the optical properties of the films change obviously. |
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