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| 液态源MOCVD控制系统研究 |
| Research on control system of the liquid source MOCVD |
| 修订日期:2006-08-14 |
| DOI: |
| 中文关键词: MOCVD 可编程逻辑控制器 触摸屏 控制系统 |
| 英文关键词:MOCVD,programmable logic controller(PLC),touch panel,control system |
| 基金项目: |
| 李岗 高爱华 |
| 西安工业大学光电工程学院 陕西西安710032 |
| 摘要点击次数: 1855 |
| 全文下载次数: 15 |
| 中文摘要: |
| 金属有机物化学气相淀积(MOCVD)技术是当前研制和生产先进化合物半导体材料的最主要技术.结合液态源MOCVD设备控制系统的组成与特点,给出了液态源MOCVD控制系统,该系统采用可编程逻辑控制器和触摸屏实现了整个系统的控制和管理,取得了满意的研究结果. |
| 英文摘要: |
| Modern MOCVD technology has been a key technology in developing and manufacturing advanced compound semiconductor materials.In this paper,based on the composition and character of control system of liguid source MOCVD,a programmable logic controller and touch panel controlled liguid source MOCVD system is well implemented for the control and management of the whole material growing process.It is satisfactory for the system in material growth. |
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