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| 基于LabVIEW的宽光谱膜厚监控系统的研制 |
| Study on optical film thickness monitoring system by wideband spectrum based on LabVIEW |
| 修订日期:2005-11-24 |
| DOI: |
| 中文关键词: 光学薄膜 宽光谱 膜厚监控 光谱特性 LabVIEW |
| 英文关键词:optical film,wideband spectrum,film thickness monitoring,spectrum characteristic,LabVIEW |
| 基金项目: |
| 王巧彬 任豪 罗宇强 |
| 广州市光机电工程研究开发中心广东省现代控制与光机电技术公共实验室 广东广州510635 |
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| 中文摘要: |
| 介绍了一种基于LabVIEW的光学镀膜宽光谱综合监控系统.阐述了光学镀膜宽光谱监控的原理和高级图像编程语言(LabVIEW)在此系统中的应用;监控系统可以用于光学薄膜在线实时监控和光学薄膜的光谱特性检测. |
| 英文摘要: |
| The study on optical film thickness monitoring system by wideband spectrum based on LabVIEW was described in this paper.The application principle on optical film thickness monitoring system by wideband spectrum and the appliance of the high-level image programme language(LabVIEW)were described too.This monitoring system can also be applied in online monitoring and spectrum characteristic study of optical film. |
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