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| 线性渐变滤光片的制备与测试 |
| Production and measurement of linear variable filter |
| 修订日期:2006-06-30 |
| DOI: |
| 中文关键词: 线性渐变滤光片 线性色散系数 测试光斑尺寸 |
| 英文关键词:linear variable filter,linear dispersion,light spot size |
| 基金项目: |
| 范滨 李刚正 程鑫彬 王利 王占山 唐骐 |
株式会社光驰 琦玉县川越市350-0801(范滨,李刚正,唐骐) ,同济大学物理系 上海200092(程鑫彬,王利,王占山)
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| 中文摘要: |
| 线性渐变滤光片是一种在小型快速分光测试设备中广泛应用的光学薄膜器件.讨论了各种线性渐变滤光片的设计方法;给出了用离子辅助沉积(IAD)工艺制备线性渐变滤光片的膜厚修正方法;并分析了线性渐变滤光片光谱测试时,滤光片线性色散系数,测试光斑尺寸对其光谱特性的影响,给出了相应的测试方法和测试结果. |
| 英文摘要: |
| Linear variable filter is a kind of optical coating device that be popular used in miniature fast spectrometer apparatus.The designing of various optical linear variable filters were discussed in this paper.The film thickness compensation method for production these linear variable filters by ion assisted deposition process were described.The linear dispersion,measurement light spot size and their effect on measurement of linear variable filter were investigated.The measurement parameter and measurement result of linear variable filter were given. |
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