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| 在固定比较片上用上反射监控方法生产窄带干涉滤光片 |
| Coating a narrow band-pass optical filter by using back reflective method monitored on a static and change-able test glass |
| 修订日期:2006-06-30 |
| DOI: |
| 中文关键词: 反射 监控 离子辅助镀膜(IAD) |
| 英文关键词:reflective,monitoring,ion assistance deposion(IAD) |
| 基金项目: |
| 闫宏 马志亮 |
北京光电技术研究所 北京100010(闫宏) ,北京电影机械研究所 北京100026(马志亮)
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| 摘要点击次数: 1957 |
| 全文下载次数: 16 |
| 中文摘要: |
| 采用上反射法在可更换的固定比较片上对光学镀膜过程进行监控,有利于优化离子束辅助镀膜工艺.介绍了实现这种监控方法的独特系统结构,即采用直角棱镜和自准直光路分离监控光束;对工艺过程和主要结果进行了描述.该监控系统的控制精度优于千分之五,耦合层控制精度优于百分之五,得到了和透射法监控相同的结果. |
| 英文摘要: |
| The best ion assistance deposition(IAD) effects could be obtained by using back reflective optical monitoring strategy on a static and change-able test glass.We demonstrated the configuration of our unique structure including a right angle prism and a self-alignment lens to split a monitoring light beam.The coating process and main results of this system were described.The control error is less then 0.5% for general layers and 5% for couple layers.The same result with the transparent monitoring method was achieved. |
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