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| 一种实用化的光控自动真空镀膜机 |
| An applied optical monitored auromatic vacuum coater |
| 修订日期:2006-06-30 |
| DOI: |
| 中文关键词: 薄膜 镀膜机 光控 |
| 英文关键词:optical coating,coater,optical monitor |
| 基金项目: |
| 马孜 肖琦 姚德武 赵汝进 何长涛 |
西南技术物理研究所 四川成都610041(马孜,肖琦,姚德武) ,西南科技大学信息工程学院 四川绵阳621002(赵汝进) ,四川大学电子信息学院 四川成都610064(何长涛)
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| 中文摘要: |
| 采用分布式控制(DCS)的方法,用小型可编程逻辑控制器(PLC)替代中型PLC,提出了镀膜真空的13个子过程概念,实现了基于国产部件的真空过程自动化.以国产光控为核心,采用组态软件和控制软件结合的方法,通过经典和现代滤波技术,实现了光控自动判停,采用监控信号变化率dR/dt来控制薄膜的蒸发束率,制作了相应的分光膜和宽带增透膜,在低成本前提下提高了光学薄膜监控的精度. |
| 英文摘要: |
| Distributed control system(DCS) was applied to build an optical multilayer coater.Small scale programmable logic controller(PLC) was used to replace the middle scale PLC.The vacuum process was divided in 13 subsequent steps to complete the automatic vacuum process.The optical monitor signal was processed by classic and modern filters to stop the layer automatically.The deposition rate was monitored by the optical monitor signal variation dR/dt to keep the control accuracy.The optical splitter and broadband anti-reflection coatings were deposited by above coater. |
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