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| 光学干涉滤光片的石英晶体膜厚自动监控技术 |
| Quartz crystal film-thickness monitoring and automatic coating of the optical interference filters |
| 修订日期:2005-05-29 |
| DOI: |
| 中文关键词: 石英晶体,膜厚监控,光学薄膜 |
| 英文关键词:guartz crystal,film-thickness monitoring,optical thin film |
| 基金项目: |
| 马志亮 王夏 闫宏 |
| 北京电影机械研究所 北京100026 |
| 摘要点击次数: 2619 |
| 全文下载次数: 21 |
| 中文摘要: |
| 介绍了用石英晶体膜厚控制仪全自动生产光学干涉滤光片的系统结构、镀膜参数和主要结果。讨论了通过改进离子辅助镀膜工艺提高T iO2薄膜折射率稳定性对于应用石英晶体膜厚监控技术的重要性。 |
| 英文摘要: |
| The system stracture,coating parameters and results of the optical interference filters,using quartz crystal film-thickness monitoring and deposition controller,had been introduced in this paper.The importance of the stability of refractive index of TiO_2 layers,enhanced by the improvement of IAD(ion assistant deposition) technology,to the applications of quartz crystal film-thickness monitoring and deposition controlling technology was discussed. |
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