|
| 几种分立式微变形镜的性能模拟与比较 |
| Simulation and comparison of several segmented micro deformable mirrors |
| 修订日期:2005-01-13 |
| DOI: |
| 中文关键词: 微机电系统(MEMS),自适应光学,微变形镜,排列方式 |
| 英文关键词:micro electromechanical system(MEMS),adaptive optics,micro deformable mirrors,array distribution |
| 基金项目:国家自然科学基金重大专项资助项目(90407020) |
| 饶伏波 乔大勇 苑伟政 姜澄宇 |
西北工业大学微/纳米系统实验室 陕西西安710072
(饶伏波,乔大勇,苑伟政) ,西北工业大学微/纳米系统实验室 陕西西安710072(姜澄宇)
|
| 摘要点击次数: 2285 |
| 全文下载次数: 27 |
| 中文摘要: |
| 采用形状函数法描述变形镜校正时的曲面,从适配误差、Streh l比两方面比较了四种不同单元排列方式的微变形镜。结果表明方形与砖形排列的微变形镜设计简单,但波前校正性能较差;圆形及蜂窝形微变形镜具有较高的波前校正性能,但设计加工复杂。 |
| 英文摘要: |
| Shape functions were used to describe the surfaces of the micro deformable mirrors in working state,and then four kinds of micro deformable mirrors with different arrays were designed for the simulation of the aberrated wavefronts correction.And their performances were compared from fitting error and Strehl ratio.The results show that the square array and the brick array are easier to design,but its performance is not good.The circular array performs best,but is more difficult to design. |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |