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| 基于AFM的微位移测量新方法研究 |
| A new method for micro-displacement measurement based on atomic force microscopy |
| 修订日期：2004-12-01 |
| DOI： |
| 中文关键词: 原子力显微镜,微位移,模板匹配,序列图像 |
| 英文关键词:atomic force microscope(AFM),micro-displacement,template matching,Series of images |
| 基金项目: |
| 陈英飞 章海军 |
浙江大学现代光学仪器国家重点实验室 浙江杭州310027
(陈英飞)
，浙江大学现代光学仪器国家重点实验室 浙江杭州310027(章海军)
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| 中文摘要: |
| 提出了一种测量物体微位移的新方法。原子力显微镜作为测量工具,样品和扫描器置于待测物体上,物体每移动一定距离就由AFM扫描获得一幅样品图像,由此获得一系列连续的序列图像。采用模板匹配方法检测相邻序列图像的偏移,从而可计算出物体的微位移。实验结果表明,用该方法还可实现物体二维方向的微位移测量,且精度达到纳米量级。 |
| 英文摘要: |
| A new method for micro-displacement measurement is presented. Atomic force microscope (AFM) acts as a measuring tool, with a reference sample and a XY scanner put on the object whose micro-displacement is to be measured. After the first image is scanned, the sample and XY scanner together with the object are moved in the X or Y direction for a short range and the second image is acquired by activating the scanner. In this way, a series of images can be successively obtained. The displacement of adjacent images can be obtained according to the method of registration techniques, and then the micro-displacement of the object can be easily counted. The experiment results show that the method also can be used to measure in two-dimension, and the measuring precision has reached nanometer scale. |
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