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| 一种新颖的点衍射干涉轻敲模式原子力显微镜 |
| A novel tapping mode atomic force microscopy using point-diffraction-interference technique |
| 修订日期:2004-09-16 |
| DOI: |
| 中文关键词: 原子力显微镜,点衍射,锁相,轻敲模式,干涉术 |
| 英文关键词:AFM,point-diffraction,phase-locked,tapping mode,interference |
| 基金项目: |
| 冷炜 杨甬英 杨李茗 |
浙江大学现代光学仪器国家重点实验室 浙江杭州310027
(冷炜,杨甬英) ,成都精密光学工程研究中心 四川成都610041(杨李茗)
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| 中文摘要: |
| 论述了一种新颖的原子力显微镜,它利用硅微探针的特殊结构和相关光学系统所引起的点衍射干涉现象[1]来扫描成像,因为硅微探针被用作反射型点衍射板,故光路完全共路,再结合锁相检测技术,使得该仪器抗干扰力极强且结构精巧紧凑,可适用于测试软硬不同材料样品,对软质高分子膜材料检测得到了实际的链状结构。 |
| 英文摘要: |
| The paper introduces a novel tapping mode atomic force microscope (AFM). It ingeniously uses point-diffraction-interference effect arising from delicate structure of silicon microprobe and correlative optical system to scan sample and image. The microprobe is used as reflected point-diffraction board so the new AFM has totally common-path optical system. Additionally, by using phase-locked loop technique the new AFM has simplified structure and high anti-jamming capability. It can measure hard or soft material sample. The measure results of macromolecular film show the actually chain structure. |
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