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| AFM纳米加工系统设计 |
| Nano-fabrication system based on atomic force microscopy |
| 修订日期:2004-09-15 |
| DOI: |
| 中文关键词: AFM,纳米结构,刻蚀 |
| 英文关键词:AFM,nano-structure,lithography |
| 基金项目: |
| 朱吉牧 章海军 张冬仙 |
| 浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室,浙江大学现代光学仪器国家重点实验室 浙江杭州310027,浙江杭州310027,浙江杭州310027 |
| 摘要点击次数: 2267 |
| 全文下载次数: 13 |
| 中文摘要: |
| 利用自行研制原子力显微镜开发了一套纳米加工系统,系统利用软件预先读入图形,根据图形控制探针的精确走向,实现复杂图案的矢量式扫描刻蚀,并且对陶瓷管的非线性畸变实现了软件矫正,实验表明系统可加工出精细的纳米图形,为进一步加工出更为精细复杂的纳米器件奠定了基础。 |
| 英文摘要: |
| A new nano-fabrication system based on AFM is presented. Using this system,a sophisticated pattern can be obtained on the surface of Al_2O_3,getting the pattem from a picture by software to control the precise steps of the cantilever and the tip. The no-linear aberration of piezo-tube is corrected by software of this system.In the experiment, structure of nano-scale is obtained, and more sophisticated nano elements can be obtained in further research. |
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