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| 高反膜的镀制实践与探索 |
| Studies of high precise high-reflective coating |
| 修订日期:2003-11-20 |
| DOI: |
| 中文关键词: 膜厚监控,高反膜,离子束辅助沉积 |
| 英文关键词:monitoring of the thin film thickness,high-reflective film,ion-assisted deposition |
| 基金项目: |
| 严晖 胡焕林 孙嵩泉 |
合肥工业大学机械与汽车工程学院 安徽合肥230009
(严晖,胡焕林) ,普乐(合肥) 光技术有限公司 安徽合肥230088(孙嵩泉)
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| 中文摘要: |
| 光学薄膜的厚度对光学元件的性能有决定性的影响,因此精确控制膜厚就成为了关键。分析了石英晶体监控法,介绍了IC/5镀膜自动控制仪。利用IC/5镀膜自动控制仪在现有镀膜机组上镀制出了高性能的高反膜。实验表明所镀膜层的光机性能优异,在光通信和激光器领域具有广阔的应用前景。 |
| 英文摘要: |
| Because the capacity of the optical component lies crucially on the thin film thickness, monitoring the deposition thickness becomes the key to the precise production. In this paper, the method of the quartz crystal monitor are analyzed, and the IC/5 deposition controller is introduced. The IC/5 deposition controller is applied in the existing coating system, and the high precise high-reflective film is made. A series of measurements show that the optical performance and coating quality have been drastically improved and will be widely used in the optical communication and the laser industries. |
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